Product Introduction:
The objective lens and aperture diaphragm feature motorized switching for more convenient and efficient operation. It is equipped with a 12-inch ultra-large moving stage, providing an ideal environment for semiconductor and FPD (Flat Panel Display) inspection. The system covers a wide range of observation methods including brightfield, darkfield, polarized light, and DIC (Differential Interference Contrast), offering you the most suitable solution for your specific needs.
Parameter Form:
Parameters
Optical System
Infinity color-corrected optical system
Observation Tube
Brightfield / Darkfield / Polarization / DIC
Infinity hinge trinocular tube, 0-35° Inclination adjustable, erect image
Interpupillary distance: 50-76mm
Reflective stand: inclined ergonomic coaxial coarse/fine focusing knobs
Coarse stroke: 35mm, Fine focus increment: 0.001mm
Equipped with anti-slip tension adjustment and parallax stop mechanism. Built-in 100-240V wide voltage system
Transmitted/Reflective stand: inclined ergonomic coaxial coarse/fine focusing knobs
Coarse stroke: 35mm, Fine focus increment: 0.001mm
Equipped with anti-slip tension adjustment and parallax stop mechanism. Built-in 100-240V wide voltage system
Manual stage: right-hand 14×12 inch three-layer mechanical stage with low-profile coaxial X/Y controls
Platform dimensions: 710mm×420mm
Travel range: 356mm×305mm
Equipped with clutch handle for rapid movement; Reflective stand includes metal platform, Transmitted/Reflective stand includes glass platform
Motorized stage:
Dimensions: 495mm×641mm, Travel range: 306mm×306mm; Software-controlled X/Y movement, Repeatability accuracy: (3+L/50)μm
Equipped with flat platform
Brightfield/Darkfield reflective illuminator with motorized variable aperture diaphragm and field diaphragm (both centerable)
Equipped with brightfield/darkfield illumination switching mechanism
Includes filter slides and polarization slots
Polarizer slider, fixed analyzer slider, interference filter set for reflection;
High-Precision micrometer
DIC components
Observation Tube
Eyepiece
High-point eyepoint widefield plan eyepiece PL10X/25mm, diopter adjustable, optional single scale cross reticle
Objective Lens
Infinity brightfield/darkfield semi-apochromatic metallurgical DIC objectives (5X, 10X, 20X, 50X, 100X)
Infinity long working distance (LWD) brightfield/darkfield semi-apochromatic metallurgical DIC objective 20X
Infinity long working distance (LWD) brightfield/darkfield semi-apochromatic metallurgical objectives (50X, 100X)
Nosepiece
6-Position motorized brightfield/darkfield nosepiece with DIC slot
Stand Group
Stage
Illumination System
Imaging System
0.35X/0.5X/0.65X/1X C-Mount camera adapters, focus adjustable
Others
Machine Show:

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